1 1 TM Grating Coupler on Low - Loss 2 LPCVD based Si 3 N 4 Waveguide Platform 3
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چکیده
We demonstrate, for the first time to our knowledge, a fully etched TM grating coupler for low-loss 12 Low-Pressure-Chemical-Vapor-Deposition (LPCVD) based silicon nitride platform with a coupling 13 loss of 6.5 dB at 1541 nm and a 1 dB bandwidth of 55 nm, addressing applications where TM 14 polarization is a pre-requisite. The proposed GC and the 360 nm × 800 nm strip based Si3N4 15 waveguides have been fabricated by optical projection lithography using an i-line stepper tool enabling 16 low-cost and mass manufacturing of photonic-integrated-circuits. 17 18
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TM Grating Coupler on Low-Loss LPCVD based Si3N4 Waveguide Platform
We demonstrate, for the first time to our knowledge, a fully etched TM grating coupler for low-loss Low-Pressure-Chemical-Vapor-Deposition (LPCVD) based silicon nitride platform with a coupling loss of 6.5 dB at 1541 nm and a 1 dB bandwidth of 55 nm, addressing applications where TM polarization is a pre-requisite. The proposed GC and the 360 nm × 800 nm strip based Si3N4 waveguides have been f...
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We demonstrate TM grating couplers for LPCVD silicon nitride platform with coupling loss of 6.5dB at 1541nm and 1dB bandwidth of 55nm employing optical projection lithography for low-cost and mass manufacturing of photonic integrated circuits. OCIS codes: (350.2770) Gratings; (250.5300) Photonic integrated circuits
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تاریخ انتشار 2017